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10 ways to boost your productivity in SiNx Deposition

  1. Get the fastest deposition rates available
  2. Minimize cleaning time
  3. Minimize operator interaction
  4. Cut down on gas consumption
  5. Forget the clean room
  6. Get inline
  7. Ensure efficiency
  8. Produce more with less investment
  9. Choose your right equipment
  10. Choose a supplier that supports you in all aspects

1. Get the fastest deposition rates available

You want high throughput rates and short cycle times to result in maximum yield. OTB Solar's DEPx is the fastest deposition system around.
The DEPX, with its unique ETP plasma source is capable to deposit Silicon Nitrides with deposition speeds up to tens of nanometers per second. Every 20 seconds 8 wafers! The design of the load-lock chambers in combination with this fast plasma source guarantees short cycle times.

  • ETP technology
    The heart of the system is the unique ETP (Expanded Thermal Plasma) source, a patented technology. In the cascade plasma source of the PECVD system, a DC-discharge of argon is sustained in a plasma channel at high pressure. The plasma emanates from the source through a nozzle and expands into the vacuum towards the substrate.

    An important benefit of the ETP plasma source is the fact that it generates remote plasma, which means that plasma production, transport and deposition are geometrically separated. The substrate does not play a role in plasma production and ion bombardment of high-energy particles on the substrate is virtually absent (0.1 / 0.5 eV for Ion / electron energy).
    No damage previous layer ? High Q

    As with any PECVD process, a wide variety of materials can be deposited with the ETP source. Typically a variety of materials are included in a process flow for solar cell manufacturing for front and rear side passivation. Relevant materials include SiN, SiOx, SiC and a-Si. OTB Solar can provide all relevant DEPx modifications to adapt the standard machine for these materials. Also excellent manufacturing and process know how make part of our product portfolio.

  • LMS technology
    The system includes a Linear Motor System (LMS), a patented technology. The carriers are transported on a rail system in vacuum without any feed-through to the outside. The motion of the carriers is achieved by a magnetic system placed outside the vacuum. Therefore the transport system is almost maintenance free and reduces the risk of a vacuum leak to a minimum.

2. Minimize cleaning time

You want your machine running as many hours as possible and don't want to loose time in cleaning processes.
DEPx has the smallest process chamber and due to its small footprint cleaning of the system is reduced to an absolute minimum, due to a clever design where the carriers are transported by a magnetic propulsion system which is placed outside the vacuum.

3. Minimize operator interaction

Manual errors are human. But why let it spoil your productivity?
OTB has a track record in automating and integrating processes and production steps into one machine without any human interference. The DEPx is a robust production machine capable of running 24 hours a day, 365 days a year with minimal operator interaction.

4. Cut down on gas consumption

Gas prices are constantly rising. Cut down on your energy bills.
The DEPx has high throughput with a minimum of gas consumptions:
Silane: < 0.45 l/min
Ammonia < 3 l/min)

5. Forget the clean room

Maintaining clean rooms are expensive, take floor space and are error-sensitive.
Due to OTB's patented Linear Motor System (LMS) the carriers are transported on a rail system in vacuum without any feed-through to the outside. The motion of the carriers is achieved by a magnetic system placed outside the vacuum. Therefore the transport system is almost maintenance free and reduces the risk of a vacuum leak to a minimum.

6. Get inline

You need equipment for the deposition of Anti Reflective Coating, but how does it fit in your production environment?
With its extremely compact footprint (4.5 m x 2.5 m), the DEPx can easily be integrated in any production facility. It can handle substrates of any kind (from Mono till Multi, from 100 mm till 210 mm and from 140 µm till 400 µm): a belt, cassette, coin stack or tray.

7. Ensure efficiency

You want products with the same production history and cycle.
DEPx' Hydrogen Passivation ensures high cell efficiency. The composition and uniformity of the layer is guaranteed by a continuous movement of the carriers under a well-balanced plasma source configuration. The DEPx provides flexibility in processes and has a robust design. Result: a quantum leap in the manufacturing process.

8. Produce more with less investment

OK, DEPx can boost my productivity but at what price?
Due to high throughput (1440 pcs / hr) with a minimum of gas consumptions (Silane: < 0.45 l/min and Ammonia < 3 l/min), the DEPx has the lowest Total Cost of Ownership.

9. Choose your right equipment

But what speeds do I actually need in my business?
OTB Solar is constantly improving and expanding its product range and technologies. At the moment we ship:
DEPx 750 - manual operation 750 pcs/hr
DEPx1000 - fully automated 1000 pcs/hr
DEPx1500 - fully automated 1500 pcs/hr

10. Choose a supplier that supports you in all aspects

OK, you'll buy a system. But what about service and maintenance?
OTB Solar is working on solar cell manufacturing equipment since 1996. Our technological and process know how combined with OTB's machine building skills have set standards. We are committed to bring our customers the competitive edge by delivering highest quality equipment AND process know how. Our worldwide service organization gives local-to-local support.



Let's focus on real innovation

Creativity comes from seeing the world differently, from an ability to think across conventional lines of thought and breaking the mold of how things are normally done. 

Business success comes from understanding markets, recognizing what people and industries need and meeting those needs through an organization structured for customers responsiveness, efficiency and financial stability.

OTB Solar combines the power of technological creativity with business understanding to deliver in-line manufacturing solutions for high-tech industries.

  • Inline manufacturing concepts
    The entire product range of OTB is based on a proven track record of inline manufacturing, developed during the past decade. Production steps are combined and afterwards synchronized to eliminate buffers. The optimized production steps are integrated in a single production system. This automation into one machine decreases the number of production steps, minimizes operator interfacing and eliminates the need for clean rooms.

  • Breakthrough technologies
    Basis of OTB's success are our technologies and expertise. OTB has globally patented technologies in the field of ultra fast deposition of thin film, inkjet molding and inkjet printing and inline automation. By integrating these breakthrough proprietary and patented technologies into tailor-made solutions and inline concepts OTB Solar created a strong competitive edge for growth and profitability.

  • Out-of-the box methodology
    To create the highest quality of inline production equipment, out-of-the box-thinking is a must. OTB Solar is constantly innovating its equipment by understanding the limits of a batch process and reduce costs by automating processes. The combination of OTB's inline design philosophy, process-know-how and machine building skills enable our customers to attain leadership in their fields. OTB Solar has a proven track record and installed base with major players.


Let's focus on real efficiency with LINEx

As the demands for clean power are increasing, the solar industry is maturing to a solid and sustainable alternative in the global energy system. OTB Solar contributes to the transition of the solar industry from lab and research phase to a fast growing and profitable industry.

The entire product range of OTB is aimed to reduce the cost price per product and bring higher yield by improving traditional production processes and inline integration. OTB Solar builds on the extensive experience and patented technologies of OTB Group in the research, development and manufacturing of inline equipment. This equipment combines dedicated Vacuum Transport Systems with optimized processes which include Inkjet Printing, Fast Cathode Deposition and Thin Film Encapsulation. This results in high process stability and uptime, compact footprint, minimized operator requirement and, above all, the elimination of a clean room.

OTB has a proven track record of inline manufacturing during the past years by OTB Engineering. Inline manufacturing - compared to batch manufacturing, has been an important tool to reduce the total cost of ownership at the manufacturing level by:

  • Integration in one machine
  • Minimizing process steps
  • Reducing operator interfacing
  • Eliminating need for clean room
  • Elimination of buffers

Minimized cost of ownership is attained by:

  • Lower investments
  • Reliable processes
  • Lower manufactured costs
  • Simpler bill of materials
  • Versatile product design
  • High up-times
  • Increased yields

The unique technical expertise built in OTB’s inline production equipment is recognized by major players (like manufacturers of LED-displays and Solar cells):

  • Processes integrated in machine
  • Developed for low tact times
  • Interdependence of processes exploited

Results:

  • Guaranteed production capacity
  • High throughput and minimized wafer breaking
  • High product quality
  • Increased yields
  • Reduced investments
  • Lowest Total Cost of Ownership